 |
|
| |
G/I-line
& Broadband pellicle
| Pellicle
Film |
Transmission
and Wavelength |
| Film
100 (Broadband)
No
anti-reflective coating(ARC)
Transmission: average 91% @ 350-450
nm wavelength |
|
|
| Film
102 (Broadband)
Single
layer FP (Fluoro Polymer) ARC
Transmission: average 97% @ 350-450nm
wavelength.
|
|
|
Film
122 (g-line, i-line)
Single
layer FP ARCN (US patent #5,339,197)
Transmission: minimum 99% @ 365nm and 436nm wavelength
|
|
Film
201 (g-line, i-line)
Single
layer FP ARC, mid-UV film
(US patent #5,339,197)
Transmission: minimum 99% @ 365nm and 436nm wavelength
|
|
|
|
|
